流体机械

2010, v.38;No.454(04) 58-62

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洁净空调室的现场实测、调整技术及性能研究
Investigation of Clean-room with Actual Measurement

元荣载;张小松;周素娟;
YUAN Rong-zai,ZHANG Xiao-song,ZHOU Su-juan (Southeast University,Nanjing 210096,China)

摘要(Abstract):

以生产LCD的垂直层流型工业用洁净厂房为研究对象,采用现场实测的方法,对洁净室内不同洁净度的两区域的气流分布进行了测量,分析了对气流造成影响的因素并提出了改善方案。研究结果表明给偏流造成影响的主要因素有:位置以及地板风口的配置方式、栅格地板的开口率、下部空间的动力设备的干涉等,此外,隔断的设置位置和室内长度、下部空间的深度等也会给气流变化造成影响。
Based on the LCD manufacture clean plant with laminar flow,air distributions of two different zones with different cleanliness were tested with actual measuring method.The factors affecting air current were analyzed and improvement program were brought forward.The conclusion shows that the main factors leading to air drift were:the location of shaft and the location of the access floor,the opening rate of the grid floor and the interruption of power equipment of the plenum,et al.Otherwise,the location of the partition,length of the clean room,and depth of the plenum would affect the air distribution.

关键词(KeyWords): 洁净室;实测;改善;偏流
clean-room;actual measurement;improve;drift

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作者(Author): 元荣载;张小松;周素娟;
YUAN Rong-zai,ZHANG Xiao-song,ZHOU Su-juan (Southeast University,Nanjing 210096,China)

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