微电子芯片高热流密度相变冷却技术High Heat Flux Phase-change Cooling for Micro Electronic Chip
池勇,汤勇,万珍平,陈平
CHI Yong,TANG Yong,WAN Zhen-ping,CHEN Ping(South China University of Technology
摘要(Abstract):
介绍了微电子芯片高热流密度相变冷却技术,包括热管、热虹吸、环路热管、毛细泵吸环路,分析了各自的优缺点,提出LHP和CPL技术是唯一能替代热管技术的先进相变冷却技术,将是今后微电子芯片高热流密度冷却的主要方向。
Phase-change cooling technique was introduced for high heat flux,including heat pipe,thermosyphon,loop heat pipes(LHP),capillary pumped loops(CPL),and their merits and shortcomings were analyzed;Only LHP and CPL was put forword can replace heat pipe to realize the advanced phase-change cooling,and they are the main stream of the high heat flux cooling for micro electronic chips.
关键词(KeyWords):
芯片冷却;热管(HP);热虹吸;环路热管(LHP);毛细泵吸环路(CPL)
cooling chips;heat pipe(HP);thermosyphon;loop heat pipes(LHP);capillary pumped loops(CPL)
基金项目(Foundation): 国家自然科学基金项目(50436010,50375055);; 广东省自然科学基金项目(04105942)
作者(Author):
池勇,汤勇,万珍平,陈平
CHI Yong,TANG Yong,WAN Zhen-ping,CHEN Ping(South China University of Technology
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- 芯片冷却
- 热管(HP)
- 热虹吸
- 环路热管(LHP)
- 毛细泵吸环路(CPL)
cooling chips - heat pipe(HP)
- thermosyphon
- loop heat pipes(LHP)
- capillary pumped loops(CPL)