高级别洁净室气流组织的优化Optimization of Airflow in High Cleanliness Level Cleanroom
赵金亮,刘俊杰,朱能
ZHAO Jin-liang; LIU Jun-jie;ZHU Neng(Tianjin University;
摘要(Abstract)：
利用CFD方法对拟采用风机过滤器单元(FFUs)洁净空调方案的ISO5级电子工业洁净室进行模拟,得出室内气流速度场,分析其性能,通过理论公式计算所能达到的洁净度。认为通过合理布置末端FFU送风口位置及选择回风形式,以及选用较高级别的末端过滤器,可以在FFU满布率较低时达到较高的洁净度级别。
By CFD technique,the velocity fields of a ISO class5 cleanroom with FFU air-conditioning system was simulated and its performance was analyzed,theoretical formula is applied to gain the cleanliness. The result shows that selecting proper location of FFUs, appropriate mode of outlet and high level terminal filter, higher cleanliness level can be obtained in spite of lower coverage rate.
关键词(KeyWords)：
计算流体动力学(CFD);洁净室;风机过滤器单元;满布率
computational fluid dynamics;clean room;fan filter uints;coverage rate
基金项目(Foundation):
作者(Authors):
赵金亮,刘俊杰,朱能
ZHAO Jin-liang; LIU Jun-jie;ZHU Neng(Tianjin University;