崔建国,王洪
CUI Jian-guo,WANG Hong(Chongqing University of Technology

• 1:重庆理工大学

摘要(Abstract)：

微型泵作为集成微流体中不可或缺的元素,在过去20年间取得了很大的进展。基于真空负压驱动原理,研制了一种结构简单的蠕动式微型泵。微型泵由三层聚二甲基硅氧烷(PDMS)材料构成(气路层,流路层,驱动薄膜层),并通过表面等离子体氧化处理技术实现了PDMS层之间的键合封装,其全部结构均采用激光器加工制作而成。蠕动驱动模式的关键在于利用气路周期性地传递负压力波,进而实现弹性薄膜的顺序变形,其中负压源通过电磁阀(EMV)进行通断控制。这种结构简化了常规蠕动泵模型中的复杂逻辑控制。实验结果表明在50kPa负压和30Hz驱动频率的条件下,获得的最佳流速为170μL/min。
As an indispensable element in integrated microfluidics,micropumps have gradually evolved over the past two decades.Based on vacuum-driven principle,a simple peristaltic micropump is developed.The micropump fabricated by laser micromachining and plasma bonding of three polydimethylsiloxane(PDMS) layers,includes a pneumatic channel layer,actuation membrane layer,and microfluidic channel layer.As the key to peristaltic motion,the sequential deflection of the elastic membranes is achieved by periodic pressure waveforms(negative) traveling through the pneumatic channel,provided by a vacuum source regulated by an electromagnetic valve(EMV).This configuration eliminates the complicated control logic typically required in peristaltic motion.Experiment results show that a maximal flow rate of 170 μL min-1 has been optimized at the pulsed vacuum frequency of 30 Hz with a vacuum pressure of 50 kPa.

关键词(KeyWords)： 微型泵;微流体;负压驱动;蠕动
micropump;microfluid;vacuum driven;peristaltic

Abstract:

Keywords:

基金项目(Foundation): 重庆市自然科学基金项目(cstc2011jjA10018)

作者(Author): 崔建国,王洪
CUI Jian-guo,WANG Hong(Chongqing University of Technology

参考文献(References)：

• [1]崔建国,郑小林,侯文生,等.基于MEMS的微型泵技术研究[J].中国医疗器械杂志,2004,28(3):190-193.
• [2]崔建国,侯文生,郑小林,等.磁能驱动微型泵的性能研究[J].传感器与微系统,2010,29(1):33-35.
• [3]Peter Woias.Micropumps-past,progress and futureprospects[J].Sensors and Actuators B-Chemical,2005,105(1):28-38.
• [4]Unger MA,Chou HP,Thorsen T,etal.Monolithic mi-crofabricated valves and pumps by multilayer soft li-thography[J].Science,2000,288(5463):113-6.
• [5]Cui Jian-guo,Pan Ting-rui.A vacuum-driven peristal-tic micropump with valved actuation chambers[J].Journal of Micromechanics and Microengineering,2011,21(6):1-7.
• [6]Wang Chih-Hao,Lee Gwo-Bin.Pneumatically drivenperistaltic micropumps utilizing serpentine-shapechannels[J].Journal of Micromechanics and Micro-engineering,2006,16(2):341-348.
• [7]Yang Sung-Yi,Cheng Fong-Yu,Yeh Chen-Sheng,etal.Size-controlled synthesis of gold nanoparticles usinga micro-mixing system[J].Microfluidics andNanofluidics,2010,8(3):303-311.
• [8]Lai H,Folch A.Design and dynamic characterizationof"single-stroke"peristaltic PDMS micropumps[J].Lab Chip,2011,11(2):336-342.
• [9]王晓娜,张亚军,庄俭,等.微型泵的研究与发展[J].流体机械,2010,38(7):38-43.
• [10]郭崇志,张清懿.安全阀阀芯传感器的标定理论与验证技术[J].流体机械,2011,39(2):47-50,87.
• [11]吴斌,刘秀成,辛军,等.基于权值差除法的Ms S超声导波管道检测试验研究[J].压力容器,2010,27(1):16-20.